Adityanarayan Pandey, Lucía Pérez Ramírez, Eun Jin Koh, and Nicolas Vaxelaire (CEA Leti) recently completed micro-X-ray diffraction (μ-XRD) experiments on the DIFFABS beamline at the SOLEIL synchrotron (Saint Aubin, France).

The objective of this session was to investigate the structural phase transformations and strain evolution in hafnium-zirconium oxide (HfₓZr₁₋ₓO₂, or HZO) ferroelectric capacitors (FeCAPs), with cycling conditions. TiN/HZO/TiN capacitors, where the total HZO layer thicknesses were 5, 7, and 9 nm and the compositional variants of the Hf:Zr ratio (1:2, 1:1, and 2:1) were studied. The HZO thin films were supplied by Uwe Schroeder’s team at NaMLab gGmbH (Dresden, Germany) while the single FeCAPs were fabricated at CEA Saclay at the SPEC nanofab facility.

 This work supported by the ANR-DFG D3PO and Ferro4EdgeAI projects (https://www.ferro4edgeai.eu/). The team gratefully acknowledges the expert support of beamline scientist Cristian Mocuta.