On their quest to elucidate the influence of the top electrode material on the oxygen vacancy distribution of ultrathin HfZrO2 FeCAPs, the LENSIS recently completed a beamtime campaign at MAXPEEM. The beamline, located at Max IV synchrotron (Lund, Sweden) is specialized Spectroscopic PhotoElectron and Low Energy Electron Microscope (SPELEEM).

Lucía Pérez Ramírez and Nicholas Barrett characterized several capacitors with different electrode materials (W or TiN), cycling (pristine, woken up, fatigued), and polarization states (up or down), to analyse the effect of material parameters on the vacancy distribution.

These results should complement the ones obtained during the Diffabs campaign (SOLEIL, add link) and contribute to building a comprehensive picture of the material characterization of HZO micro-structured FeCAPs.

This work supported by the ANR-DFG D3PO and Ferro4EdgeAI projects (https://www.ferro4edgeai.eu/). The team gratefully acknowledges the expert support of the beamline team: Evangelos Golias, Yuran Niu, and Weihua Lin.