Jayshree Dadheech, Lucía Pérez Ramírez and Akash Mhase (INL Lyon) recently conducted hard xray photoelectron spectroscopy (HAXPES) experiments on the GALAXIES  beamline at the SOLEIL synchrotron (Saint Aubin, France).

This beamtime was utilized to investigate the effect of Ta and TaOx interlayers on the interfacial chemistry of a reference stack TiN/Hf0.5Zr0.5O2/TiN and analyze their impact on the oxygen vacancy concentrations. Two batches with different Hf0.5Zr0.5O2 (HZO) thickness (6.7nm and 11.4nm) were investigated. These interlayer samples were fabricated using radio frequency sputtering by Akash Mhase, Sara Gonzalez at Institut des nanotechnologies de Lyon.